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Paperback Fabrication Engineering at the Micro- And Nanoscale Book
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ISBN: 0199861226

ISBN13: 9780199861224

Fabrication Engineering at the Micro- And Nanoscale

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Format: Paperback

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Book Overview

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Related Subjects

Electrical & Electronics Engineering Technology

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