While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences... This description may be from another edition of this product.
Format:Hardcover
Language:English
ISBN:0819412066
ISBN13:9780819412065
Release Date:January 1993
Publisher:SPIE-International Society for Optical Engine
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