Ion Implantation and Synthesis of Materials
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Book Overview
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implantation. Ion beam processing can also be used to improve corrosion resistance, to harden surfaces, to reduce wear and, in general, to improve materials properties. This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification, such as ion-beam mixing, stresses, and sputtering, are also described.
Format:Hardcover
Language:English
ISBN:3540236740
ISBN13:9783540236740
Release Date:August 2006
Publisher:Springer
Length:263 Pages
Weight:1.19 lbs.
Dimensions:0.8" x 6.3" x 9.4"
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Engineering Science Science & Math Science & Scientists Science & Technology TechnologyCustomer Reviews
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