Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact
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This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Format:Hardcover
Language:English
ISBN:3319939246
ISBN13:9783319939247
Release Date:August 2018
Publisher:Springer
Length:438 Pages
Weight:1.85 lbs.
Dimensions:1.1" x 6.1" x 9.2"
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