Microsensors: Principles and Applications

By Julian W. Gardner

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Book Overview

The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors-the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.

Format:Paperback

Language:English

ISBN:0471941360

ISBN13:9780471941361

Release Date:August 1994

Publisher:Wiley

Length:344 Pages

Weight:0.95 lbs.

Dimensions:0.9" x 6.6" x 9.5"

Related Subjects

Computer Technology Electrical & Electronics Engineering Industrial, Manufacturing & Operational Systems Technology

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Microsensors: Principles and Applications

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