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Hardcover Scanning Electron Microscopy: Physics of Image Formation and Microanalysis Book
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ISBN: 3540853170

ISBN13: 9783540853176

Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

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Format: Hardcover

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