Surface Metrology for Micro- And Nanofabrication

by Wei Gao

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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Format:Paperback

Language:English

ISBN:0128178507

ISBN13:9780128178508

Release Date:November 2020

Publisher:Elsevier

Length:448 Pages

Weight:1.70 lbs.

Dimensions:0.9" x 7.5" x 9.3"

Related Subjects

Engineering Technology

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Surface Metrology for Micro- And Nanofabrication

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